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Process Integration
Qubit Control
Review Paper
Characterization
Simulation
Cryo CMOS
Enabling Technologies
1μm Pitch direct hybrid bonding with <300nm wafer-to-wafer overlay accuracy
2017
First demonstration of a CMOS over CMOS 3D VLSI Cool Cube™ integration on 300mm wafers
By
Maud Vinet
2016
Demonstration of low temperature 3D sequential FD-SOI integration down to 50 nm gate length
By
Maud Vinet
2011